Owner's manual

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IPN 074-508-P1C
CMS5000 Operating Manual
5.5 System Integration
The current system I/O integration allows only input commands. This includes the
selection and start of a method created in the CMS IQ software. See section 5.6,
Setting Startup Methods, for details on how to input methods. For more advanced
integration details, please contact INFICON.
5.6 Setting Startup Methods
The CMS5000 can be operated automatically. In the Parameters tab, a Startup
Method, a method that will automatically run when powering on the system, can
be selected. Additionally, a method sequence can be selected as a startup method.
See section 5.8 on page 5-25 for information on creating a method sequence.
1 Double-click the Status icon, which is located on the System Setup screen of
CMS IQ. See Figure 5-43.
Figure 5-43 Status Icon
2 Click on the Parameters tab. See Figure 5-44.
Figure 5-44 Parameters Tab