O P E R A T I CI-100 Crucible Indexer IPN 074-544-P1B N G M A N U A L
O P E R A T I N G M A N U CI-100 Crucible Indexer IPN 074-544-P1B ® www.inficon.com ©2012 INFICON re achus@inficon.
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CI-100 Crucible Indexer Operating Manual Table Of Contents Trademarks Disclaimer Copyright Chapter 1 Introduction 1.1 1.2 1.2.1 1.2.2 1.3 1.4 1.5 1.5.1 1.5.2 1.6 1.7 1.7.1 1.7.2 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . .
CI-100 Crucible Indexer Operating Manual 2.8 2.8.1 2.8.1.1 Interfacing to INFICON Deposition Controllers . . . . . . . . . . . . . . . . . . . . . . 2-8 Interfacing to SQC-310 Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . 2-8 BCD I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8 2.8.1.2 Binary I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8 2.8.2 2.9 2.
CI-100 Crucible Indexer Operating Manual Chapter 1 Introduction 1.1 Introduction The CI-100 Crucible Indexer is used to rotate multi-pocket electron beam sources through a rotary vacuum feedthrough. The CI-100 consists of a 3.5 in. half-rack Controller, Motor Drive, Mounting Bracket, and interconnecting cable. Figure 1-1 CI 100 Crucible Indexer IPN 074-544-P1B In addition to the capabilities you expect in a crucible indexer, the CI-100 has these unique features: 160 oz-in.
CI-100 Crucible Indexer Operating Manual 1.2 Safety 1.2.1 Definition of Notes, Cautions and Warnings When using this manual, please pay attention to the Notes, Cautions, and Warnings found throughout. For the purposes of this manual they are defined as follows: NOTE: Pertinent information that is useful in achieving maximum efficiency when followed. CAUTION Failure to heed these messages could result in damage to the instrument. WARNING Failure to heed these messages could result in personal injury.
CI-100 Crucible Indexer Operating Manual 1.2.2 General Safety Information WARNING - Risk Of Electric Shock Do not open the instrument case! There are no user-serviceable components within the instrument case. Dangerous voltages may be present whenever the power cord or external input/relay connectors are present. Refer all maintenance to qualified personnel. CAUTION This instrument contains delicate circuitry which is susceptible to transient power line voltages.
CI-100 Crucible Indexer Operating Manual 1.4 Returning Your Instrument to INFICON Do not return any component of your instrument to INFICON without first speaking with a Customer Support Representative. You must obtain a Return Material Authorization (RMA) number from the Customer Support Representative. If you deliver a package to INFICON without an RMA number, your package will be held and you will be contacted. This will result in delays in servicing your instrument.
CI-100 Crucible Indexer Operating Manual 1.5.2 Controller Specifications Pockets. . . . . . . . . . . . . . . . . . . . . . . Up to 8 Inputs/Outpus . . . . . . . . . . . . . . . . . . Binary or BCD Encoded Low 0 to 2 V (dc), High 4 to 24 V (dc), non-isolated Communication . . . . . . . . . . . . . . . . RS-232 only Size (H x W x D) . . . . . . . . . . . . . . . . 3.5 x 8.4 x 7.8 in. (88 x 213 x 197 mm) Weight . . . . . . . . . . . . . . . . . . . . . . . 6 lbs. (2.7 kg) Power . . . . . . . . . . . . . . .
CI-100 Crucible Indexer Operating Manual 1.7 Parts and Options Overview 1.7.1 Base Configuration Thin Film Manual CD . . . . . . . . . . . . . . . .074-5000-G1 CI-100 Indexer . . . . . . . . . . . . . . . . . . . . .782-CI-100 Includes: CI-100 Controller . . . . . . . . . . . . . . . . . . .782-900-024-G1 Drive Motor. . . . . . . . . . . . . . . . . . . . . . . .782-900-025-G1 Power Cord . . . . . . . . . . . . . . . . . . . . . . .068-0433 Ethernet Cable . . . . . . . . . . . . . . . . . . . . .
CI-100 Crucible Indexer Operating Manual Chapter 2 Installation 2.1 Introduction The CI-100 controller requires AC mains power, and should be located within 10 ft. of the Motor drive unit. The Motor drive typically can be mounted to the E-Beam indexer feedthrough shaft using the mounting bracket and flexible coupling supplied. NOTE: The CI-100 uses a four rotation full cycle. This means that after four full turns of the motor, it is considered to be back at the home position.
CI-100 Crucible Indexer Operating Manual Thread the two 10-32 shoulder screws from the inside of one of the box sides until the threads extend fully to the outside. Attach the Extender Kit to the CI-100 controller by threading the shoulder screws into the matching holes in the instrument covers. Attach the rack mounting ears with the 10-32 flat-head screws provided. Mount the assembly in a 19 in. rack with 10-32 screws (not provided). 2.2.
CI-100 Crucible Indexer Operating Manual Attach the motor to the mounting bracket with 4 each 10-32 screws so that the set screws on the flexible coupling can secure both the motor and feedthrough shafts. Tighten the coupling set screws. 2.3.2 Drive Mount without Bracket The motor drive can be mounted in several locations using 10-32 screws. Select screws that protrude no more ¼ in. into the motor housing.
CI-100 Crucible Indexer Operating Manual 2.4 Electrical Connections WARNING Be sure the power switch on the CI-100 controller front panel is OFF. Plug the power cord into the CI-100 power entry module, then into a 100-120 or 200-240 V (ac), 50/60 Hz mains outlet. Attach the DB-25 control cable from motor drive to the connector marked Motor on the CI-100 controller. The I/O and RS-232/LAN connections are covered later in this chapter. They are not needed for initial setup. 2.
CI-100 Crucible Indexer Operating Manual 6 Move the Pocket/Jog switch to Pocket. Press CW/CCW to move to the next pocket. NOTE: The indexer should stop at a position that is nearly correct. If not, check the rear panel dip switches carefully. 7 If the pocket is not at the desired home position for that pocket, move the Pocket/Jog switch to Jog. Push CW/CCW to jog to home for that pocket. 8 Press and hold the Calibrate switch until the displays stop blinking (about three seconds).
CI-100 Crucible Indexer Operating Manual Table 2-1 Binary I/O Connector (continued) Pin Signal 17 Unused 18 Unused 19 Unused 20 Unused 21 Unused 22 Unused 23 Unused 24 Unused 25 Unused 2.7 BCD I/O Connector The BCD I/O connector controls pocket selection by decoding the pocket select information on three inputs. NOTE: Select Switch #5 must be on (up) to use this connector.
CI-100 Crucible Indexer Operating Manual There are two possible Pocket Select Bit decodings as shown below: Switch #7 Off (down) Switch #7 On (up) Bit0 Bit1 Bit2 Bit0 Bit1 Bit2 1 Hi Hi Hi Lo Hi Hi 2 Lo Hi Hi Hi Lo Hi 3 Hi Lo Hi Lo Lo Hi 4 Lo Lo Hi Hi Hi Lo 5 Hi Hi Lo Lo Hi Lo 6 Lo Hi Lo Hi Lo Lo 7 Hi Lo Lo Lo Lo Lo 8 Lo Lo Lo Hi Hi Hi Pocket When the BCD I/O is used to select/operate custom banana configurations, operation of the Bit 0 to Bit
CI-100 Crucible Indexer Operating Manual 2.8 Interfacing to INFICON Deposition Controllers 2.8.1 Interfacing to SQC-310 Deposition Controller 2.8.1.1 BCD I/O BCD wiring between the CI-100 and SQC-310 is preferred over Binary I/O wiring because it uses fewer SQC-310 relays.
CI-100 Crucible Indexer Operating Manual On the CI-100 rear panel, set Select Switch #5 Down. On the SQC-310 System Menu / Sensors & Sources, set up the Source with: Number of Positions: 4 Control Type: Individual Feedback Type: In Position Indexer Delay: 5 seconds 2.8.2 Interfacing to IC6 Deposition Controller The INFICON IC6 does not support binary indexer wiring. BCD wiring between the CI-100 and the IC6 is required.
CI-100 Crucible Indexer Operating Manual 2.9 RS-232/LAN Connector A DB-9 to RJ-45 adapter and standard Ethernet cable are supplied for connecting the CI-100 to the PC for RS-232 communications. NOTE: CI-100 does not support Ethernet communications. Table 2-3 RS-232/LAN Connector RJ-45 Pin Signal DB-9F Pin 1 (Wht/Org) Unused 2 (Org) Unused 3 (Wht/Grn) Unused 4 (Blu) RS-232 Tx 2 (Red) 5 (Wht/Blu) RS-232 Rx 3 (Grn) 6 (Grn) Unused 7 (Wht/Brn) RS-232 Ground 8 (Brn) Unused 5 (Brn) 2.
CI-100 Crucible Indexer Operating Manual Table 2-4 Motor Connector (continued) Signal 15 DAC CLKn 16 DAC DATAn 17 STEPn 18 DIRn 19 Encoder CLKn 20 Encoder CSn 21 Encoder DATAn 22 Ground 23 Ground 24 24 V (dc) 25 24 V (dc) IPN 074-544-P1B Pin 2 - 11
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CI-100 Crucible Indexer Operating Manual Chapter 3 Operation 3.1 Introduction The CI-100 Indexer can be operated using the front panel switches to move to a discrete pocket, or to sweep within a continuous (i.e., banana) pocket. Pocket home for each pocket can also be set from the front panel. The CI-100 can also be operated remotely (Auto mode) using the rear panel digital I/O or RS-232 communications. The rear panel also provides switches for setting pocket configuration and other movement options.
CI-100 Crucible Indexer Operating Manual Select/Speed Display Normally shows the desired pocket in Manual mode. Normally blank in Auto mode. If the indexer is sweeping in a continuous (i.e. banana) pocket, then the decimal point flashes and the sweep speed is displayed. CW/CCW Switch This spring-loaded switch moves the indexer clockwise or counterclockwise. Push and hold for continuous rotation. If Uni-Direction is selected on the rear panel, only moves the indexer in one direction.
CI-100 Crucible Indexer Operating Manual Ready LED On when the indexer is positioned at a valid pocket, otherwise off. Moving LED On when the indexer is moving between pockets, or within a continuous pocket. 3.3 Controller Rear Panel Figure 3-2 Controller Rear Panel NOTE: The rear panel switches are only read at power up. Be sure to power off, then on, after changing the rear panel dip switches. Pocket Type Switch 1: Selects a four discrete pocket indexer. 2: Selects a six discrete pocket indexer.
CI-100 Crucible Indexer Operating Manual 6: RS-232 communications (off) NOTE: CI-100 does not support Ethernet communications. 7: Bit decode selection for BCD I/O Mode – see section 2.7 on page 2-6. 8: Unused. BCD I/O Connector The pocket is selected using BCD encoded inputs. Same function and pinout as MDC/Sycon indexers. See Chapter 2 for pinout and compatibility instructions. NOTE: Option switch 5 must be on (up) to use this connector. Binary I/O Connector The pocket is selected by individual inputs.
CI-100 Crucible Indexer Operating Manual 3.4 Custom Configuration The CI-100 custom configuration allows up to eight pocket positions in a 360° arc. Each position can be designated as discrete, or continuous (i.e., banana). The eight positions can be defined at any point along the 360° arc. This capability is best illustrated by an example. Assume you have a discrete pocket, then a 120° banana, then another discrete pocket, and finally another 120° banana.
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CI-100 Crucible Indexer Operating Manual Chapter 4 Computer Interface 4.1 Introduction The CI-100 Controller’s front panel controls and rear panel dip switches will provide adequate operation and setup capabilities for most users. The rear panel digital I/O also allows basic operation for system controllers. For programming the custom pocket configuration, and computer-controlled operation, use the RS-232 communication interface. 4.
CI-100 Crucible Indexer Operating Manual Main Screen The CI-100 Crucible Indexer V1.XX software can be used to control the CI-100, send or receive a configuration file, send commands and receive responses, or simply used to monitor the position of the CI-100. Pocket: The uppermost left grid of the main screen shows the current position and status of the CI-100. A "?" indicates that software is not communicating with the CI-100 at the present time.
CI-100 Crucible Indexer Operating Manual 4.3 Command Protocol The CI-100 communicates with a host computer via an ASCII based protocol. The instrument RS-232 configuration is set to 19200 baud, 8 data bits, and no parity. The basic protocol is: <$> <1 to n data characters> Once a valid command has been transmitted to the CI-100, a response is returned. The structure of the packet is identical in both the command and response.
CI-100 Crucible Indexer Operating Manual 4.4.3 B Command: B Parameters: 1 to 8, ? Description: Read/Set the current pocket. Example: B? Response: 2 (on pocket 2) B3 Go to pocket 3 4.4.4 C Command: C Parameters: 0 to 8, ? Description: Read/Set speed. Example: C? Response: 0 (speed 0 is selected) C1 Set to speed 1 4-4 Speed Hi Speed (RPM) Lo Speed (RPM) 1 0.5 0.05 2 0.6 0.06 3 0.8 0.08 4 1.0 0.10 5 1.2 0.12 6 1.5 0.15 7 1.9 0.19 8 2.4 0.24 9 3.0 0.30 0 3.
CI-100 Crucible Indexer Operating Manual 4.4.5 D Command: D Parameters: ? Description: Read motor status. Example: D? Response: M (motor is moving) D? Response: R (motor is stopped) 4.4.6 F Command: F Parameters: 1 to 8, ? Description: Read/Set the number of pockets for the custom configuration. Example: F? Response: 4 (4 pockets) F8 Set number of pockets to 8 IPN 074-544-P1A 4.4.7 G Command: G Parameters: 1 to 8, ? Description: Read/Set custom configuration pocket parameters.
CI-100 Crucible Indexer Operating Manual 4.4.9 M M Parameters: 1 to 9, ? Description: Read/Set custom configuration pocket speed. See the “C” command for speed values. Example: M2? Response: 1 indicates speed 1 (0.5/0.05 rpm) M3 2 Set pocket 3 to speed 2 (0.6/0.
