Datasheet

www.apem-idec.eu
D-072
APEM
Switches &
Pilot Lights
Control Boxes
Emergency
Stop Switches
Enabling
Switches
Safety Products
Explosion Proof
Terminal Blocks
Relays & Sockets
Circuit
Protectors
Power Supplies
LED Illumination
Controllers
Operator
Interfaces
Sensors
AUTO-ID
Emergency Stop Switches
X6
XA
XW
XN
SEMI
SEMI EMO Switch Guards
SEMI S2-compliant Combinations
EMO Switch Guard Applicable Emergency Stop Switches
XA9Z-KG1
XA1E-BV4****-EMO (
), XA1E-BV3 ( ), XA1E-LV3 ( ), XA1E-BV4 ( ), XA1E-LV4 ( )
HW9Z-KG3
XW1E-BV4****-EMO (
), XW1E-BV4 ( ), XW1E-LV4 ( ), XW1E-TV4 ( ), HW1B-V3 ( ), HW1B-V4 ( ),HW1B-X4 ( ),
HW1B-Y2 ( )
HW9Z-KG4
XW1E-BV4****-EMO (
), XW1E-BV4 ( ), XW1E-LV4 ( ), XW1E-TV4 ( ), XW1E-BV5 ( ) HW1B-V3 ( ), HW1B-V4 ( ),
HW1E ( ), HW1B-X4 ( ), HW1B-Y2 ( )
HW9Z-KG5
XW1E-BV4****-EMO (
), XW1E-BV4 ( ), XW1E-LV4 ( ), XW1E-TV4 ( ), XW1E-BV5 ( ), HW1B-V3 ( ),HW1B-V4 ( ),
HW1E ( ), HW1B-X4 ( ), HW1B-Y2 ( )
Note:
EMO switch guards have been designed for applications in semiconductor manufacturing equipment only. Do not use EMO switch guards with emergency stop
switches which are installed on machine tools or food processing machines. (Machinery Directive of the European Commission and IEC 60204-1 require that emer-
gency stop switches be installed in a readily accessible area, and the usage of switch guards is not permitted.)
About SEMI
SEMI is an international industry association whose member companies produce materials, equipment, and related technology for manufacturing
semiconductor, flat panel display (FPD), and micro-electromechanical systems (MEMS) products. The SEMI safety guideline was published for the
semiconductor industry and it is observed with the same importance as standards.
SEMI S2-0706, 12.1 describes as follows; “The equipment should have an ‘emergency off’ (EMO) circuit. The EMO actuator (e.g., button), when
activated, should place the equipment into a safe shutdown condition, without generating any additional hazard to personnel or the facility.”
Because the semiconductor environment involves solvents and chemicals in many cases, some of which are toxic, interrupting the power source
may cause secondary accidents. SEMI safety guideline requires the installation of an emergency off switch which disconnects only the part respon-
sible for the hazardous situation, and maintains the functions of safety-related devices (e.g., smoke detectors, gas/water leak detectors, pressure
measurement devices, etc.).
Emergency off buttons should be located or guarded to minimize accidental activation (SEMI S2-0706, 12.5.1). The emergency off button should be
red and mushroom shaped. A yellow background for the EMO should be provided (SEMI S2-0706, 12.3).
838 mm
minimum
1638 mm
maximum
(3 m maximum) (3 m maximum)
EMO button EMO buttonOperator
• Location of EMO switches on semiconductor manufacturing equipment
Acceptance criteria: controls should not be located above 1638 mm (64.5 in.) or below 838 mm (33 in.)
(SEMI S8-0705, 9.1.2).
• No operation or regularly scheduled maintenance location should require
more than 3 m (10 feet) travel to an EMO button (S2-0706, 12.5.2).
XA9Z-KG1 HW9Z-KG3 HW9Z-KG4
HW9Z-KG5
⑱
⑲
⑳
㉑
㉒
㉓
㉔
㉕
The combination of IDEC’s EMO switch guards and emergency stop switches are approved by TÜV Rheinland for compliance with SEMI S2 standards.