Owner manual

38
INTELLIGENT ACTUATOR
Chapter 1 Installation
2. Speci¿cations
30
63.6 Xst:400
2.52.5
84
26
Yst:400
2.5 2.5
60
40
213.6
73
8 42 23
2914 30
4429
58
7.5
30
20.5
49
60
4973142
317
5810156
8 85
10.6 520 28
10
510
1.5
22
41.8
605
30 148.8 45 335 45
50 40
50
1.8
4.3
7.3
4.3
2-M4, depth 5
2-M5, depth 5
2-
I
4H7, depth 5
Y-slider mounting hole
X-slider position
adjustment volume
Home
ME
Home
ME
ME
ME SE
SE
4-M5, depth8
4-M5, depth10
2-
I
4H7, depth 5
Y-slider position
adjustment volume
T-groove
Weight [kg] 35
T-groove
(locations)
T-groove
Large, cantilever 2-axis type with 400-mm XY-axis stroke