Owner manual

37
INTELLIGENT ACTUATOR
Chapter 1 Installation
2. Speci¿cations
30
13.6
2.5
Xst:200
2.5
26
84 Yst:200
2.5 2.5
120
60
40
50
Home
46 51.8
2.52.5
405
1.24513545148.830
41.8
49
605
50
71
5810
317
8 85 156
124.51.5
(34)
10.6
330.6 42
10310
37.4
30
50
42 30
Z-slider mounting hole
50 40
37.4
50
T-groove
1.8
4.3
7.3
4.3
T-groove
4-M , depth 10
2-I4H7, depth 5
4-M4 , depth 8
99.8 (Zst: 100 --- 149. 8)
X-slider position
adjustment volume
Y-slider position
adjustment volume
T-groove (4 locations)
197.8 (Zst: 100 --- 247. 8)
Zst: 50
(or 100)
ME
ME
SE
Home
ME
SE
ME
ME
SE Home ME
Z-slider position
adjustment volume
4-M4 , depth 8
2-I4H7, depth 5
4-M , depth 10
Weight [kg] 18
Compact, cantilever 3-axis type with 200-mm XY-axis stroke