Instruction Manual
77
12. Precautions for Use
12.6 Suction Rate of Cleanroom Specification IX-NNC2515H/3515H
Cleanness class 10 can be achieved by suctioning air at the specified rate through the quick joints for suction
provided on the base and rear panel.
The suction device and suction air tubes (12) are provided by the customer.
Suction rate (Nl/min)
80
Quick joint for suction (applicable
tube: outer diameter 12, inner
diameter 8)