User guide

page 24 of 61
Documents are only to be used and distributed completely and unchanged. It is strictly the users´ responsibility to check carefully
the validity of this document with respect to his product. Manual-no.: 999248 / 28/04/2011
Pump down
Vac control
Auto mode
Program
Conguration
Function of the device:
(displayed in the upper left corner)
1013 . 2
mbar
Vac control
100
Display and symbols
mbar
Torr
hPa
Preselected pressure unit
1013.2
Actual absolute pressure at the
pressure transducer
00:00:00
Vacuumcontroltoapresetvacuumvalue(here100mbar/Torr/hPa)
Pump down (continuous pumping)
Process runtime (only if process control is running)
Pump symbol is displayed when pump is running.
The pump’s motor speed in % is displayed additionally
50%
100
Actual pressure = set vacuum
ashing:actualpressure>presetmaximumvalue(“Maximum“)
Minimumvalue(“Minimum“)reached
Control is running
Warningnotice(ifnecessaryincombinationwithothersymbols),ashing
Coolant valve switched on
Venting valve switched on
PC symbol: controller is in remote operation
Time meter is running (in function ”VACUULAN”), remaining time in minutes is dis-
played
5
Level sensor activated
Emission condenser Peltronic connected