Operating Manual

nanofocus X-ray inspection of high-end interconnections
As a solution for µAXI with extreme high defect coverage, phoenix|x-ray provides its high preci-
sion off-line µAXI system nanome|x including the unique x|act software package for fast and easy
offline CAD programming. Outstanding precision and repeatability, small views with resolutions
of only a few micrometers, 360° rotation and oblique viewing up to 70° ensures meeting highest
quality standards. Besides the automated X-ray inspection, the µAXI system can be used for ma-
nual failure analysis or 3D computed tomography as well.
Electronic packages are sophisticated electronic devices with complex, internal features. In or-
der to meet the quality requirements of the industry, X-ray inspection solutions must not only be
capable of delivering detail detectabilities in the submicron range but also of detecting hidden
defects and flaws. With its nanofocus technology, the nanome|x provides focal spot sizes in the
submicron range to ensure very little geometric fuzziness and greater resolution allowing it to re-
solve image features as small as 200 nanometers. The two images on the right side clearly show:
the smaller the focal spot, the sharper the image.
For high resolution 3D analysis of smaller samples, the nanome|x system can be upgraded for
full 3D computed tomography. High power nanofocus X-ray technology paired with a fast re-
construction software deliver unrivaled, highest-quality inspection results with nanoCT
®
image
resolutions.
The 3D nanoCT
®
image on the right side shows, that each individual die attach is clearly visi-
ble and can be examined for voids.
microfocus: focal spot 5 microns
nanofocus: focal spot < 1 micron
Automated multiple die inspection
3D nanoCT
®
of stacked dies
Pores in a single die attach
Live CAD overlay with inspection results
GE Sensing & Inspection
Technologies GmbH
phoenix|x-ray
Niels-Bohr-Str. 7
D-31515 Wunstorf | Germany
Tel.: + 49 5031.172-0
Fax.: + 49 5031.172-299
[e-mail]
Further offices:
[e-mail]
[e-mail]
[e-mail]
[e-mail]
[e-mail]
www.gesensinginspection.com
GEIT-31202EN (0910)
GE
Measurement & Control Solutions
phoenix|x-ray
>
>
x|act
meeting zero-defect quality standards
nanoCT
®
high-resolution 3D imaging
 Efficient CAD programming - minimized setup time
 3D auto-referencing - optimized positioning accuracy
 Live 3D CAD overlay - easy pad identification even in oblique
viewing and rotation