Brochure

Unique features of the phoenix microme|x and nanome|x
x|act-capable µAXI systems
Live 3D CAD data overlay
• Pad ID available at any time
• Easy pad identication even in manual inspection
• High reproducibility on large PCBs
• Perfect orientation through live overlay of CAD-data and inspection
results also in rotated oblique inspection views
• Live inspection rich in detail due to high dyna-
mic GE DXR detectors with 30 fps and instant
Flash!
TM
Filters image optimization
• 180 kV / 20 or 15 W high-power submicron tube
with down to 0.5 or 0.2 µm detail detectability
• diamond|window for up to 2 times faster data
acquisition at the same high image quality level
• Optionally 3D computed tomography scans
within 10 seconds
Flash! Filters optimized inspection results and
CAD and result data live overlay in the X-ray live
image - at any time and at any viewing angle
The unique x|act software package is available in base and uncalibrated operator configuration for the phoenix x|aminer,
and additionally also in calibrated operator and pro configuration for the phoenix microme|x and phoenix nanome|x sys-
tems. Both systems come standard with an open 180 kV microfocus or nanofocus X-ray tube with 15 or 20 W maximum
power in order to achieve a detail detectability down to 200 nanometer with the phoenix nanome|x or down to 0.5 microns
with the phoenix microme|x.
The excellent combination of high-resolution 2D X-ray technology and 3D CT in one system, innovative and easy-
to-use features and the outstanding positioning accuracy make these systems the effective and reliable solution for a
wide spectrum of 2D and 3D inspection tasks: R&D, failure analysis, process and quality control as well as automated
offline inspection.
X-ray inspection
boosted by
Flash! Filters™ Technology
X-ray
inspection
boosted by
Flash! Filters™
Technology
Flash! Filter
x|act provides not only a minimal setup time compared with
conventional view based AXI - once programmed, the inspec-
tion program is also portable to all x|act compatible systems.
• Easy and pad-based offline programming
• Specific inspection strategies for different pad types
• Fully automated inspection program generation even in oblique view
and multiple angular positions
Efficient CAD programming - minimized setup time
Easy programming: just assign the inspection strate-
gies and let x|act generate the inspection program