Operating Manual

x|act - CAD based inspection:
high resolution µAXI for extremely high defect coverage
As a solution for µAXI with extremely high defect coverage, phoenix|x-ray provides its high preci-
sion systems microme|x and nanome|x including the unique x|act software package for fast and
easy offline CAD programming. Outstanding precision and repeatability, small views with resolu-
tions of only a few micrometers, 360° rotation and oblique viewing up to 70° ensures meeting high-
est quality standards - even for inspection of components with a pitch of just 100 microns. Besides
automated inspection, x|act ensures an easy pad identification by its live CAD data overlay function
even in manual inspection while Flash! Filters
TM
image optimization ensures high defect coverage.
•Brilliant live inspection images due to high dynamic GE DXR
digital detector array
•Uniquehighpower180kV/20Wsubmicronor
nanofocus* tube for even high absorbing electronic samples
•Minimizedsetuptimeduetohighlyefficientautomated
CAD programming
•LiveoverlayofCADandinspectionresultseveninrotated
oblique inspection views
•Extremelyhighdefectcoverageandrepeatability
•Outstanding ease-of-use
•Detail detectability down to 0.5 µm or even 0.2 µm
•OptionalFlash!Filters
TM
image optimization technology
•Optionaladvancedfailureanalysiswithhighresolution
3D micro- or nanoCT
®
•Optional3DCTscansupto10seconds
phoenix microme|x / nanome|x – Your Advantages
Efficient CAD programming – minimized setup time
x|act provides not only a minimal setup time compared with conven-
tional view based AXI - once programmed, the inspection program is
portable to all x|act compatible systems.
• Import of CAD-data
• Easy pad-based oine programming
• Specic inspection strategies for dierent pad types
• Fully automated generation of the inspection program even in oblique view
and multiple angular positions per component
• Full program portability for all x|act compatible phoenix|x-ray systems
Fast and easy programming: just assign the in-
spection strategies and let x|act generate the
automated inspection program
Repeatably high defect coverage
• Extremely high positioning accuracy even at oblique viewing and rotation
• Easy pad identification in manual X-ray inspection
• High reproducibility on large PCBs
x|act provides live CAD overlay and inspection
results in the x-ray live image - at any time, at
any viewing angle. GE‘s exclusive Flash! Filters
technology option enables faster, more reliable
failure detection (right)
* Nanofocus 20 W only with diamond window, otherwise 15 W