Operating Manual

phoenix microme|x / nanome|x
The high performance X-ray inspection solution
The phoenix microme|x and nanome|x series combines high-resolution 2D X-ray technology and 3D
CT in one system. Innovative and unique features and an extreme high positioning accuracy make
both systems the effective and reliable solution for a wide spectrum of 2D and 3D offline inspection
tasks: R&D, failure analysis, process and quality control.
The phoenix|x-ray x|act technology offers easy to program CAD based µAXI ensuring automated
inspection in the micrometer range. Another unique benefit is GE´s highly dynamic DXR flat panel
detector with active cooling. Offering up to 30 frames per second, it provides outstanding brilliant
live imaging and fast data acquisition for 3D CT.
Brilliant DXR-HD live imaging
Flash! ltered voids in an open µBGA
ball: 1,970x geometric zoom for ex-
treme high magnication
With GE´s proprietary high dynamic DXR detector with enhanced scintillator
technology phoenix|x-ray introduces a new industry standard for efficient
live inspection:
• Full frame rate of 30 frames per second at 1000x1000 pixels offers low noise coupled
with brilliant image quality ensuring fast and detailed live inspection
• Active temperature stabilization for precise and reliable inspection results
• Extremely fast data acquisition in 3D CT mode
• Detail detectability down to 0.5 µm / 0.2 µm for high performance failure analysis
Compared to conventional beryllium targets, the diamond|window
allows higher power at a smaller focal spot. This ensures high-
resolution even at a high output.
• Up to 2 times faster CT data acquisition at the same high image
quality level
• High output with high-resolution
• Non-toxic target
• Improved focal spot position stability within long term measurements
• Increased target lifetime due to less degradation with higher power
density
High output with high-resolution: diamond|window
diamond|window beryllium window
nanoCT
®
of TSVs in an electronic pa-
ckage. The voids in the copper lling
are clearly visible.
High-resolution 3D computed tomography
For advanced inspection and 3D analysis of smaller samples, phoenix|x-
ray’s proprietary 3D-CT technology is optionally available.
• 180 kV high power X-ray technology, fast image acquisition with DXR detector and
diamond window combined with phoenix|x-rays fast reconstruction software deliver
high quality inspection results
• Maximum voxel resolution down to 2 microns; the nanoCT
®
capability of the
nanome|x allows even a higher image sharpness
(same X-ray tube parameter: 130 kV, 11.4 W)