Operating Manual

ManualsBrandsGE ManualsMicrofocus and NanofocusGE Phoenix nanome|x / microme|x DXR

phoenix microme|x / nanome|x

High resolution 180 kV micro- / nanofocus X-ray

inspection systems with 3D CT option

Brilliant high dynamic imaging with live CAD data overlay

Open BGA ball with live

CAD data overlay and

Flash! Filters

image

optimization

3D Computed Tomogra-

phy of an USB ash drive

Automated PTH solder

joint inspection with live

CAD data overlay and

Flash! Filters

image

optimization

Unique features

• Temperature stabilized digital DXR detector with

active cooling for high dynamic live imaging

• 180 kV / 20 W high-power micro- /nanofocus

tube with up to 0.5 µm or 0.2 µm detail

detectability

• x|act package for CAD based µAXI program-

ming and automatic inspection

• diamond|window for up to 2 times faster data

acquisition at the same high image quality level

• Optionally 3D computed tomography scans

within 10 seconds

Measurement & Control

Summary of content (4 pages)

PAGE 1
GE Measurement & Control Bril lian t hi gh dyn am ic im agi ng wit h liv eC AD dat ao ver la phoenix microme|x / nanome|x High resolution 180 kV micro- / nanofocus X-ray inspection systems with 3D CT option Open BGA ball with live CAD data overlay and Flash! FiltersTM image optimization Unique features • Temperature stabilized digital DXR detector with active cooling for high dynamic live imaging • 180 kV / 20 W high-power micro- /nanofocus tube with up to 0.5 µm or 0.
PAGE 2
phoenix microme|x / nanome|x The high performance X-ray inspection solution The phoenix microme|x and nanome|x series combines high-resolution 2D X-ray technology and 3D CT in one system. Innovative and unique features and an extreme high positioning accuracy make both systems the effective and reliable solution for a wide spectrum of 2D and 3D offline inspection tasks: R&D, failure analysis, process and quality control.
PAGE 3
x|act - CAD based inspection: high resolution µAXI for extremely high defect coverage As a solution for µAXI with extremely high defect coverage, phoenix|x-ray provides its high precision systems microme|x and nanome|x including the unique x|act software package for fast and easy offline CAD programming.
PAGE 4
Technical Specifications & Configurations System magnification and resolution Geometric magnification: Total magnification: Detail detectability: DXR max. 1,970 x; max. 2,130 x with image intensifier DXR max. 2,660 x; max. 22,150 x with image intensifier up to 0.5 µm; nanome|x up to 0.