Brochure

Systems
Technology
Closed tube or open tube?
Closed tubes: All tube components
are contained in a sealed vacuum
vessel container. Closed tubes are
maintenance-free and are completely
replaced at the end of their lifetime.
Open tubes: All components and wear-
out parts are accessible and replacea-
ble, the tube is continuously evacuated
by a turbomolecular pump. Open tubes
yield higher resolution and magnifica-
tion and are not limited in lifetime.
phoenix|x-ray offers a wide range of X-ray systems in different configurations for a variety of inspection tasks in the electronics
and semiconductor industries. phoenix|x-ray’s systems have superior specifications that are able to solve the highest demands:
pcb|inspector
high performance - low maintenance
pcb|inspector is the solution for
process control on standard BGA / SMD
and planar solder joints. Due to the
maintenance-free closed tube and
the high quality image chain the
pcba|inspector provides excellent defect
recognition at medium magnifications.
Optional manipulation upgrades enable
oblique views.
The nanotom
®
comes standard with a
180 kV / 15 W ultra high-performance
nanofocus tube and precision mecha-
nics for maximum stability. With voxel
resolution as low as 500 nanometer, the
nanotom
®
is the inspection solution of
choice for 3D CT applications in a wide
range of fields. With its small footprint,
the nanotom is suitable for even the
smallest labs.
For many applications, the nanotom
®
offers a viable alternative to synchro-
tron-based computed tomography.
nanotom
®
highest resolution in three dimensions
This automated X-ray system with superior
specifications satisfies the highest demands:
The 180 kV / 15 W high-power nanofocus tube
(4-in-1) covers the full range from submicron
resolution to high intensity applications. Due to
the easy view configuration, the X-ray image
displays the sample exactly as the operator
sees it through the radiation protection win-
dow. The digital realtime image chain with
4 MPixel camera provides an excellent contrast
resolution and enables oblique views up to 70 degrees at magnifications well above
24 000 x. For samples of poor contrast the system may be equipped with a high
dynamic fully digital high-contrast|detector – as supplement to the image chain, of-
fering unique performance and versatility. Optionally, the nanome|x may be equipped
with nanoCT
®
capability.
nanome|x
the ultimate X-ray solution
The microme|x is a high-resolution
automated X-ray inspection (AXI) system
that is most suitable for failure analysis
in the semiconductor and electronics
industry. It comes standard with an ultra
high performance 180 kV / 20 W X-ray
tube for sub-micron feature recognition
> 0.5 m and a high-resolution 2 MPixel
digital image chain. This system provides
a total magnification of up to 23.320x
(without software zoom) and oblique
angle views of up to 70 degrees. The
microme|x combines proven high-resolu-
tion 2D and 3D CT X-ray technology in
one system. With the new x|act package
for CAD based AXI programming the
microme|x is the system of choice to en-
sure meeting zero defect requirements.
microme|x
automated solder joint inspection