Brochure
Image definition and contrast
Unrivaled resolutions
nanofocus technology
Microfocus X-ray tubes have focal
spots that are as small as 3 microns
in size. But penumbra e ects, and,
as a consequence, residual unsharp-
ness, still occur. With its nanofocus
technology with focal spot sizes well
below 1 micron, phoenix|x-ray has
successfully managed to eliminate
the penumbra e ect even when us-
ing highest-intensity X-rays.
microfocus:
Focal spot size 10 microns
What is the diff erence between
nanofocus and microfocus tubes?
Image defi nition and contrast are both key to detecting. With
the nanofocus technology with detail detectabilities down
to 200 nanometers, submicron resolutions and a fully digital
high-contrast|detector that outperforms any image intensifi er-
based image chain, phoenix|x-ray is once more leading the
way in X-ray inspection technology.
high-contrast|detectors enable inspection of low absorbing
features
microfocus image F = 5 μm nanofocus image
microfocus:
Focal spot size 5 microns
high-contrast|detector
image|intensifier
Focal spot 3 microns Focal spot 600 nm (0.6 microns)
Flip-chip bonds, 30 microns in diameter
Copper Wires
Test pattern (W on Si) with period 2 m
Verifi cation of resolution using a periodic test pattern. If the
grid period is the same size as the focal spot, the pattern van-
ishes. Using nanofocus technology, the bars are clearly visible
proving that nanofocus tubes deliver detail detectabilities well
below 1 micron –
proved with Jima.
Non-conductive die attach
Technology
What is it that makes the difference?
microfocus system
nanofocus
system
source
object
detector
Superior contrast
high-contrast|detector
nanofocus
focal spot
< 1 micron
High dynamic digital detectors
active temperature stabilization
The image quality is essential for an optimal defect coverage
of all 2D and 3D inspection tasks. The new active temperature
stabilized GE DXR detectors ensure a very low noise live-imag-
ing. Due to its high dynamic, the DXR detector shows a brilliant
live image with 30 frames per second at full resolution.