User Manual

aecting the lithography or another critical process.
Because you are measuring all the organics with the
500 RL
e
, your facilities engineers are given the best tool
to optimize their processes. The top semiconductor
companies in the world accept no other options for
their critical UPW TOC measurements.
Low DO / Hydrogenated Water Applications
Low DO and hydrogenated water systems are becoming
more common in microelectronics applications. Low DO
systems present a signicant challenge to reagentless
TOC analyzers because all reagentless TOC analyzers
rely on the process water as a source of oxygen for fully
oxidizing the organics in the sample.
In low DO systems, there is insucient oxygen available
to facilitate full oxidation, resulting in articially low TOC
results. If a contamination event occurs, the lack of
oxygen may prevent complete oxidation of the organics.
Consequently, most analyzers will show little or no change
in the TOC value. Only the Sievers 500 RL
e
incorporates
trace oxygen addition to ensure fully oxidized organics in
low DO and hydrogenated water systems. This gives you
the ability to see important changes in your water system
that other analyzers completely miss (see Figure 2).
Robust Method
TOC Recovery
The 500 RL
e
has been extensively tested to demonstrate
comparability to the Sievers PPT Analyzer as well as
superior performance relative to competitive TOC
technologies.
1,2,3
Figures 1 and 2 show the performance
of the 500 RL
e
in normal and Low DO systems, compared
to the PPT and alternative TOC technologies.
Risk of Simplied TOC Methods
Can you trust the TOC results from your analyzer
to provide your fabrication engineers with the best
measurement tools? Simplied TOC methods used in
other TOC analyzers expose the water system and fab
to contamination risks from compounds that these
simplied technologies can not detect. In numerous
published studies and technical papers,
1,2,3
these
simplied TOC analyzers have been demonstrated
to be incapable of reliable performance in waters
containing even the simplest organic compounds —
compounds known to exist in UPW systems, introduced
through the feed waters, resins, system materials,
and production processes. The Sievers membrane
technology dramatically enhances the ability to detect
and manage variations in TOC contamination that
can go unnoticed and uncontrolled with older, more
simplied TOC sensors.
Figure 1. Recovery comparison of Sievers and other brands
Figure 2. Recovery graph for TOC injections
% Recovery for 5 ppb TOC Injections
-100
0
100
200
300
400
500
900 500-24 500-19 PPT-6 PPT-9 A-1000 5000TOC
% Recovery
2-Propanol Urea Acetic Acid CHCl
3
TMA TMAH
% Recovery on 5 ppb Injections
- Dissolved O
2
< 2 ppb
-50
0
50
100
150
200
250
300
350
400
TMA 2-Propanol Acetic Acid Chloroform Urea
% Recovery
Sievers (Membrane Conductometric)
Competition (Direct Conductometric)
% Recovery for 5 ppb TOC Injections
% Recovery on 5 ppb Injections - Dissolved O
2
< 2 ppb