Application Note

4 Fluke Corporation Indoor air quality monitoring made easy with the Fluke 985 Particle Counter
A cleanroom exercise
(certification and monitoring)
Cleanrooms are an excellent applica-
tion for a particle counter. Certification
for cleanrooms is usually conducted
at “as build” stage. For illustration
purposes, let’s put the Fluke 985 to
the test in evaluating an ISO Class 5
(per ISO 14644) cleanroom. To qualify
as a Class 5 cleanroom, levels cannot
exceed the limits for the class in each
particle size stated in the following
table:
Our test is concerned with the
concentration of 0.3 μm particulates in
the room. Several 2-liter samples are
taken from six different locations over
6 different time inside the cleanroom,
with the following results:
Concentrations (C1)
Ave. Concentration
(AC1)
Location (L) 1 2 3 4 5 6
A 750 560 655 730 674
B 1575 1250 750 950 1100 1300 1154
C 1300 850 980 1125 1350 975 1097
D 1150 775 450 825 845 1000 841
E 825 855 730 940 695 925 828
F 1700 1585 1135 900 1725 1210 1376
Table 1.
ISO
Classification
Class Particulate Limits
0.1 µm 0.2 µm 0.3 µm 0.5 µm 1.0 µm 5.0 µm
m
3
m
3
m
3
m
3
m
3
m
3
1 10 2
2 100 24 10 4
3 1000 237 102 35 8
4 10000 2370 1020 352 83
5 100000 23700 10200 3520 832 29
6 1000000 237000 102000 35200 8320 293
7 352000 83200 2930
8 3520000 832000 29300
9 35200000 8320000 293000