Specifications

Characteristics

Backtrace function

When the chamber stops because of

trouble, the operation state just before the

chamber stops is automatically recorded

and saved. Saved data can be transferred

by USB memory.

Attach this data file to an email to ESPEC,

and we will perform troubleshooting.

Online diagnostics services

Diagnostics service is available using the

backtrace data from the time of trouble.

Send the backtrace data to ESPEC via

email; we will analyze the cause of the

trouble and report the diagnosis back to

you.

This service ensures accurately-performed

diagnosis so that, in the case that

repair work is required, appropriate

troubleshooting will be prescribed

ensuring reduced testing downtime.

International safety standard

compliance

Complies with Safety of Machinery

(ISO 12100), Low Voltage (IEC 60204),

EMC (IEC 61000-6-2, IEC 61000-6-4).

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International safety standard compliance

220, 380 and 400V AC spec. are in compliance with the

requirements of the European Community Directives (hereinafter

referred to as CE spec.)

· Machinery Directive 2006/42/EC

· Low Voltage Directive 2006/95/EC

· Electromagnetic Compatibility Directive 2004/108/EC

· Pressure Equipment Directive 1997/23/EC

Backtrace setting

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Online diagnostics services

(http://www.espec.co.jp/english/support/onlinediagnosticsservice.html)