Installation guide

Table Of Contents
2. Installation
Safety and Installation (RC90 / EPSON RC+5.0) Rev.6
27
Installation Procedure
When the Manipulator is Clean-model, unpack it outside of the clean room.
)
NOTE
Secure the Manipulator not to fall, and then wipe off the dust on the
Manipulator with a little alcohol or distilled water on a lint-free cloth. After
that, carry the Manipulator in the clean room. Connect an exhaust tube to
the exhaust port after installation.
CAUTION
Install the LS series Manipulator with two or more people.
The Manipulator weights are as follows. Be careful not to get
hands, fingers, or feet caught and/or have equipment damaged by
a fall of the Manipulator.
LS3-401* : approx. 14 kg: 31 lb.
LS6-602* : approx. 17 kg: 37.5 lb.
10 mm
4-M8
×
25
Screw Hole
(depth 20 m m
or more)
Spring
Washer
Plan e
Washer
(1) Secure the base to the base
table with four bolts.
Use bolts with specifications
conforming to ISO898-1
Property Class: 10.9 or 12.9.
)
NOTE