Scara Robot Manipulator Manual
Maintenance 4. Maintenance Parts List 
82  G3 Rev.1 
4.2    Parts by Environment Model 
4.2.1 S: Standard-model 
Part Name  Code  Note 
Ball Screw Spline  150 mm 
R13B010220 
Arm Cover  R13B030421  White 
Arm Bottom Cover  R13B030423   
4.2.2 C: Cleanroom-model 
Part Name  Code  Note 
Ball Screw Spline  120 mm 
R13B010221 
Arm Cover  R13B030422  Plating 
Arm Bottom Cover  R13B030424   
Bellows R13B030704 
Gasket Unit  R13B031234   










