Operating instructions

ADJUSTING THE MEASUREMENT PLANE
51
Average, Plane fit or higher order filters can not be used.
• The Z-Controller functions less accurately, because it has to compensate
for the sample slope.
Maladjusted slope: measurement with improperly set X*-slope
Slope: Sample’s and measurement orientation before slope adjustment
X
Y
Z, Z*
Scanner XY-plane
'X-Slope' angle
'Y-Slope'
angle
'Rotation'
angle
Measurement plane
Image area
X*
Y*