Instruction manual

3 - 40
Relationship between minus tilting angle and Z position is the same as manual stage.
Movable range of X and Y directions (3 axes motorized stage)
Type1
Specimen
Size
X Y
φ15mm
17.5∼32.5 17.5∼32.5
φ25mm
12.5∼37.5 12.5∼37.5
φ50mm
0∼50 0∼50
φ75mm
0∼50 0∼50
φ100mm
0∼50 0∼50
φ125mm
0∼50 0∼50
φ150mm
0∼50 6∼50
□100mm 0∼50 6∼50
□125mm 0∼50 6∼50
NOTICE
When optional detector has been inserted to its operating position, further limitation is
required.
Refer to the operation manual of using optional detector.
3.5.6.5 Stage Locking
For high magnification work, stage locking is recommended for better mechanical stability. The
Z and T axes are locked or released by Lock button on the specimen stage.
Release the lock to move Z and T axes.
CAUTION

If the Z or T axes are moved while stage is locked, the stage mechanism may be damaged.
X, Y and R axes are free and available when the stage is locked.