Specifications

First Steps

7 Make some test moves with the individual axes using the controls

on the

Axes tab card:

The first moves should be made in open-loop operation (

Servo

boxes must be unchecked). With the E-517, open-loop

commanding means to give the desired output voltage values for

the axes. Command an output voltage of 0 V by entering 0 in the

Openloop Value field of an axis and pressing Enter on your

keyboard. Then enter a new value of about 10% of the axis voltage

range and press Enter. Increment the

Openloop Value this way by

steps of a suitable size, up to the upper voltage limit of the axis

(see datasheet or measurement protocol of the mechanics), and

then reduce it in an analogous manner to the lower voltage range

limit of the axis. In doing so, observe the position display for the

axis (in the

Position field) and the current output voltage for the

corresponding piezo actuator in the stage (in the

Voltage field of

the

Piezo channels tab card). The output voltage values should

follow the commanded values. At 0 V output voltage, the current

position value of the axis should be approximately 0 μm, but due to

the calibration settings of the system, the axis position can differ

from 0 by about 20% of the axis travel range.

You can also use the

< and > buttons to decrement / increment the

commanded value by the value given in the

Step size field (1.0 V in

the figure below).

If open-loop operation is successful, you can switch to closed-loop

operation by checking the

Servo boxes on the Axes tab card (see