Instruction Manual

FLOW RANGES
TABLE I DMF 41 LOW FLOW MASS FLOW CONTROLLERS*
TABLE II DMF 36 MEDIUM FLOW MASS FLOW CONTROLLERS*
TABLE III DMF 46 HIGH FLOW MASS FLOW CONTROLLERS*
* Flow rates are stated for Nitrogen at STP conditions [i.e. 70
F
F (21.1
F
C) at 1 atm].
For other gases use the K factor as a multiplier from APPENDIX 2.
9
CODE
scc/min [N
2
]
CODE
std liters/min [N
2
]
401 0 to 10 07 0 to 1
402 0 to 20 08 0 to 2
403 0 to 50 09 0 to 5
404 0 to 100 10 0 to 10
405 0 to 200
406 0 to 500
CODE standard liters/min [N
2
]
11 0 to 15
30 20
31 30
32 40
33 50
CODE standard liters/min [N
2
]
40 60
41 80
42 100