Datasheet

Data Sheet
Package outline dimensions
The package is compatible with SMD assembly process.
Operating conditions
MiCS-5524
1084 rev 8
Sensor configuration
The silicon gas sensor structure consists of an accurately micro machined diaphragm with an
embedded heating resistor and the sensing layer on top.
The internal connections are shown above.
Pin Connection
A
B
C Rh1
D Rs1
E
F Rh2
G Rs2
H
J
K
MiCS-5524 configuration (bottom view)
Page 4 of 5