Manual

Model 10C
Table 1 10C Controller Models
Model # Target Gas Standard Range Formula
AsH3-10 Arsine 0-1 PPM AsH3
Br2-10 Bromine 0-5 PPM Br2
B2H6-10 Diborane 0-5 PPM B2H6
CG–10 Combustible Gases 0-100 % LEL various
CH20-10 Formaldehyde 0-100 PPM CH20
CH30H-10 Methanol 0-100 PPM CH30H
CH3SH-10 Methyl Mercaptan 0-100 PPM CH3SH
CLO2-10 Chlorine Dioxide 0-1 PPM CLO2
CL2-10 Chlorine 0-10 PPM CL2
CO-10 Carbon Monoxide 0-100 PPM CO
COCL2-10 Phosgene 0-1 PPM COCL2
CO2-10 Carbon Dioxide 0-1 % CO2
CS-10 Carbonyl Sulfide 0-100 PPM CS
CS2-10 Carbon Disulfide 0-100 PPM CS2
C2H2-10 Acetylene 0-100 PPM C2H2
C2H3CL-10 Vinyl Chloride 0-100 PPM C2H3CL
C2H30-10 Acetyldehyde 0-100 PPM C2H30
C2H4-10 Ethylene 0-100 PPM C2H4
C2H4O-10 Ethylene Oxide 0-100 PPM C2H4O
C2H5OH-10 Ethanol 0-100 PPM C2H5OH
C2H6S-10 Dimethyl Sulfide 0-100 PPM C2H6S
C3H3N-10 Acrylonitrile 0-100 PPM C3H3N
C3H5OCL-10 Epichlorohydrin 0-10 PPM C3H5OCL
C4H4S-10 Thiophane 0-100 PPM C4H4S
C4H6-10 Butadiene 0-100 PPM C4H6
C4H8S-10 Tetrahydrothiophene 0-100 PPM C4H8S
C4H6O2-10 Vinyl Acetate 0-100 PPM C4H6O2
F2-10 Fluorine 0-1 PPM F2
GeH4-10 Germane 0-2 PPM GeH4
HBr-10 Hydrogen Bromide 0-30 PPM HBr
HCL-10 Hydrogen Chloride 0-30 PPM HCL
HCN-10 Hydrogen Cyanide 0-30 PPM HCN
HF-10 Hydrogen Fluoride 0-10 PPM HF
H2S-100 Hydrogen Sulfide 0-100PPM H2S
H2-10 Hydrogen 0-100 PPM H2
H2-10 LEL Hydrogen 0-100 % H2
NH3-10 Ammonia 0-100 PPM NH3
NO-10 Nitric Oxide 0-100 PPM NO
NO2-10 Nitrogen Dioxide 0-5 PPM NO2
N2H4-10 Hydrazine 0-1 PPM N2H4
O2-10 Oxygen 0-25 % O2
O3-10 Ozone 0-1 PPM O3
PH3-10 Phosphine 0-5 PPM PH3
SiH4-10 Silane 0-50 PPM SiH4
SO2-10 Sulfur Dioxide 0-20 PPM SO2
10C Control Module Instruction Manual Rev.0.B Page 6 of 25