User manual

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 DocumentMT0100P.N
©XsensTechnologiesB.V. MTiandMTxUserManualandTechnicalDocumentation
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6 PhysicalSpecifications
6.1 Physicalsensoroverview
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MTiandMTxSensorFactTable
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Accelerometers MEMS solidstate,capacitativereadout
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Rateofturnsensor
(rategyroscope)
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MEMS solid state, monolithic, beam structure,
capacitativereadout
Magnetometer Thinfilmmagnetoresistive
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Further,theMTiandMTxhaveseveralonboardtemperaturesensorstoallowcompensationfortemperature
dependencyofthevarioussensors.