User's Guide

B.1
Appendix B
PanelSense™ APS-FPD
The PanelSense APS-FPD sensor is primarily used for particle detection in Flat Panel Display
manufacturing processes.
General information about PanelSense APS-FPD: The APS-FPD operates the same as an APS3,
but is in a different form factor and comes with additional components that enable simultaneous
measurement using multiple APS-FPD devices.
General operation of the APS-FPD device and reviewing log files are the same as APS3. See chapters
3, 4, and 5.
This Appendix explains the installation and operation of multiple APS-FPD devices being used
simultaneously.
• APS-FPD components
• Charging the battery and external battery packs
• Installing the ParticleSpectrum software and SENA Link
• Pairing the APS-FPD to the SENA Link in ParticleSpectrum
• Multiple device windows and linking devices
• Using ParticleSpectrum with linked devices
• Log files of linked devices