User's Guide

1.1
Chapter 1
Introduction
The CyberOptics WaferSense
®
Airborne Particle Sensor 3 (APS3) measures airborne particles
inside semiconductor process equipment, and PanelSense™ Airborne Particle Sensor - Flat
Panel Display (APS-FPD) measures airborne particles for flat panel display manufacturing.
Throughout this document, all devices in this family will be referred to as “APS.”
The ParticleSpectrum™ software application makes it easy to view particle measurements in
real time. The large display and wireless link let you place the computer at a convenient distance
from the APS3 device. The APS3 wafer is vacuum compatible, with an operating pressure of 0.4
(300 Torr) to 1.6 atmosphere, with the ability to go to 0 atmosphere.
APS3 consists of the following components:
• APS3 device. The APS3 is designed with a wafer-like and reticle-like form factor, so
it can fit in most handling equipment or tools. The device is vacuum compatible, with
an operating pressure of 0.4 (300 Torr) to 1.6 atmosphere, with the ability to go to 0
atmosphere.
• ParticleSpectrum™ software. The ParticleSpectrum software
application monitors the particle measurements and other status information
in real time. Review functionality lets you view and compare log files recorded.
ParticleSpectrum runs on most personal computers that use the Microsoft Windows
operating system. See Chapter 6, “Specifications,” for platform requirements.
• Wireless link. The software communicates with the APS wafer by using a Bluetooth
wireless link that attaches to a USB port on a personal computer.
• Charging case. The APS3 device is powered by an internal rechargeable battery,
which you recharge by placing the APS3 device into the charging case.
• Carrying case. The carrying case makes it easy to take your complete APS3 system
with you in the plant or on the road.
The following chapter provides you with instructions for installing your APS3 system.
See Appendix B – APS-FPD for additional information regarding PanelSense APS-FPD.