User's Guide

6.1
Chapter 6
Specifications APS3
WaferSense APS3 Features
Wireless, wafer-shaped and battery-powered
Available in 300mm. Model #8025754.
Easy-to-use software: ParticleSpectrum
ParticleSpectrum: Displays real-time numeric and visual feedback, cumulative or differential
counting modes and density or frequency modes. Replays log file data for review and analysis.
Highly accurate: Measures particles greater than 0.14μm Size channels: Reports particles in
0.1μm and 0.5μm bin sizes and larger particles in 2, 5, 10, and 30μm bin sizes.
Less than 5 false counts per hour
Durable housing: 300mm carbon fiber substrate coated with Parylene C. SEMI standard
notch.
Lightweight: 185 grams (300mm)
Airflow 0.07CFM (2L/min)@ 1 atmosphere
Operating pressure 0.4 to 1.6 atmosphere, with the ability to go to 0 atmosphere
Operating internal temperature 15 deg C to 45 deg C non-condensing
Charging operating temperature range: 0 deg C to 45 deg C
Battery-operation >1.8 hour per charge. Battery performance degrades at temperatures
outside the optimum operating temperature range. Inductive wireless charging and hands-free
operation. Typical battery recharge cycles: approximately 400
Link Box: Bluetooth, Class 1, 2.4GHz connected via USB.