User's Guide

iii
Labels on Devices
Laser and hazard labels as they appear on the APS3 devices.
WaferSense and ReticleSense Technical Support
Technical support is available from CyberOptics Corporation.
WaferSense and ReticleSense are registered trademarks, and ParticleSpectrum are trademarks,
of CyberOptics Corporation.
Third-party brands and names are the property of their respective owners.
Copyright © 2018 CyberOptics Corporation. All rights reserved.
5900 Golden Hills Drive, Minneapolis, Minnesota, 55416
Part # 8025869 Rev A
E-mail: [e-mail]
Phone: [phone]
[phone] (US and Canada only)