User's Guide

Table of Contents
Chapter 5
Maintaining Your APS3 ................................................................. 5.1
Annual Factory Calibration and Battery Replacement ................. 5.3
Battery Use and Disposal
..............................................................5.4
Chapter 6
Specifications ................................................................................. 6.1
WaferSense APS3 Specifications ................................................... 6.1
Compliance and Directives ...........................................................6.2
WaferSense APS3 Drawing
............................................................6.3
Appendix A
Large Particle Detection ................................................................ A.1
Large Particle Mode Selection ....................................................... A.2
Reading the ParticleSpectrum Display ..........................................A.3
Large Particle Chart ....................................................................... A.3
Go/No-Go Threshold dialog ......................................................... A.4
Viewing the log file.........................................................................A.5
Appendix B
PanelSense APS-FPD ..................................................................... B.1
APS-FPD Components .................................................................. B.2
Charging the Battery and External Battery Packs
........................B.3
Installing the ParticleSpectrum Software ......................................B.3
Installing the SENA Link Hardware ............................................. B.4
Pairing APS-FPD to the SENA Link in ParticleSpectrum ............ B.6
Multiple Device Windows and Linking Devices ........................... B.9
Using ParticleSpectrum with Linked Devices ...............................B.12
Log Files of Linked Devices ..........................................................B.13
Index .................................................................... Index.1