User's Guide
Chapter 3. Using Your APS3
3.16
The layout of the data in the comma-delimited file is in columns as displayed in Figure 3.15.
Marks are also saved.
Figure 3.15: Layout of Comma-Delimited File
Changing the Log File Directory
By default, ParticleSpectrum writes log entries to the directory C:\WaferSense\APS Files\. If
you prefer, you can specify a different directory.
To change the log file directory:
1. Choose the menu item Settings > Output Folder > Browse Icon
2. In the Browse for Folder dialog, specify the folder name for the log files, and click OK.
ParticleSpectrum writes data to the file once per second