User's Guide

Chapter 3. Using Your APS3
3.5
Figure 3.3: Reading the ParticleSpectrum Display
• Numerical and graphical displays. The top-left quadrant of the ParticleSpectrum
display shows the particle measurements in numerical form. As the APS3 device detects
particles, it assigns them to “bins” based on particle size. The displayed numbers are particle
measurements averaged over a time interval (see “Changing the Averaging Interval,” on page
3.19). The grid area of the display on the right shows a graph of the particle measurements.
You can select one bin at a time to display on the graph (see “Selecting the Particle Size to
Graph,” on page 3.17). The graph shows a dotted line for the average particle measurement
over time, as shown in the numerical displays, and a solid line that is the real-time particle
measurement received from the wafer. You can adjust the horizontal and vertical scales of
the graph (see “Changing the Vertical Scale,” on page 3.18 and “Changing the Horizontal
Scale,” on page 3.19). The most recent measurement always appears at the right edge of
the graph. When the APS3 device is purging, the measurement display boxes and the graph
are blank. A Purging Countdown Timer will appear in the lower left portion of the graph
window.