User's Guide

Chapter 2. Installing Your APS3
2.2
Installing the ParticleSpectrum APS3 Software
To install and run the APS software ParticleSpectrum, your computer must have the following:
• Windows 7 (32-bit or 64-bit), Windows 8, Windows 10 operating systems
• One free high-power USB 1.1 or USB 2.0 port
To install the APS software, do not plug in the link before you start. The software must be
installed first using the following steps:
1. Log on using an account with Administrator privileges.
2. Insert the WaferSense APS Installation Disk into the CD drive.
The InstallShield Wizard starts automatically, as shown in Figure 2.1. If the wizard doesn’t
start automatically, use Windows Explorer to view the contents of the CD and double click
the WaferSenseInstaller.exe program.
Figure 2.1: The InstallShield Wizard
3. Follow the instructions provided by the wizard to install the software.