User Manual

Linear Piezo Nanopositioning Stage User Manual
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(a) X65N81K26
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(b) XY65N81K26
(c) XYZ65N81K26
3. Product Overview
3.1 Product Introduction
This linear piezo nanopositioning stage is piezoelectric screw motion platform, with
a combination of linear motor piezoelectric screws and a sliding stage, and the high-
precision motion of the piezoelectric screw is used to control the movement of the sliding
stage. Two dimensional or three-dimensional motion control can be formed with multiple
piezoelectric screw motion platforms.
3.2 Product Features
Travel up to 25.4mm/axis
1 to 3 axes motion
Displacement increment <30nm
Standard and vacuum versions are available
3.3 Motion Direction