User Manual

7
where,
-
Overall resonance frequency
-
Rotating inertia of unload moving surface
-
Unload resonance frequency
-
Rotational inertia of lens
The overall resonance frequency can be calculated using the unload resonance frequency
and the rotational inertia of the lens. The calculation formula is as follows:
0
'
0
1/
m
f
f
II
=
+
'
f
0
I
f
m
I
3.3 Features
3.4 Moving direction
θx tilt
Tilt angle up to 4mrad
Sub-ms response time
High closed loop positioning accuracy
AXIS1
Figure3. S22 moving direction