User Manual

S22 Piezo Tip/tilt Platform User Manual
6
X-axis tilt angle:
Dynamic characteristics of piezo tip/tilt platform:
/
X PZT
La θ =
where,
-
PZT travel range
-
Distance between PZT and rotation axis
a
PZT
L
where,
-
Mass of lens
M
-
Rotational inertia of lens
-
Thickness of lens
-
Radius of lens
Operating frequency of S22 depends on the resonance frequency. In order to estimate the
resonance frequency (moving surface and lens) after loading the lens, the rotational inertia
of the lens must be taken into account. The rotational inertia of the lens is calculated as
follows:
Rotational inertia of cylindrical lens:
Rotational inertia of rectangular section lens:
2
22
3
12 2
m
RH H
Im T

+

= ++





2
22
12 2
m
LH H
Im T

+

= ++





m
I
-
Lens length perpendicular to rotation axis
L
H
-
Distance from rotation axis to platform surface
T
R