User Manual

S22 Piezo Tip/tilt Platform User Manual

3. Product Overview

3.1 Product Introduction

S22 series piezo tip/tilt platform has the following advantages:

High performance piezo stack:

S22 piezo tip/tilt platform is driven by high-performance piezo stack. It is fully insulated,

so its performance and service life are far superior to those of conventional platform.

The insulating layer could effectively prevent the piezo stack from being damaged by

moisture. The stability of piezo stack could be ensured under extreme conditions. It has

the characteristics of no rebound, no wear.

Flexible hinge structure:

S22 adopts flexible hinge mechanism, which has the advantages of no friction and high

positioning accuracy. The flexible hinge is a component that is not affected by static and

dynamic friction. It is based on the elastic deformation of solid (such as steel) and has no

rolling and sliding parts. With high stiffness and load carrying capacity, the hinge guides

are maintenance-free and wear-free. Suitable for a wide range of temperatures without the

need for lubricants.

SGS sensor：

SGS sensor detects position information by expanding, they are fixed at appropriate

positions in transmission portion, and the displacement is measured.

S22 series Piezo Tip/Tilt Platform is a one-dimensional θx axis deflection platform. The

flexible hinge guiding design has zero friction and static resistance, excellent guiding

precision, nano-radian resolution and excellent positioning stability. With a beam

deflection range of up to 6mrad, it has an extremely fast response speed (milliseconds to

microseconds) and is ideal for dynamic operation (eg tracking, scanning, drift and vibration

cancellation) and positioning of optics and samples.