User Manual

P73 Piezo Objective Scanner User Manual
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3. Product Overview
3.1 Product Introduction
P73 Piezo Objective Scanner has the following advantages:
High performance piezo stack:
P73 Piezo Objective Scanner is driven by a highly reliable ceramic actuator with a fully
insulated structure, so its performance and service life are far better than the traditional
actuator. The insulating layer can effectively prevent the piezoelectric ceramic from being
damaged when exposed to moisture. Therefore, the stability of piezoelectric ceramics
can be guaranteed under extreme circumstances. Compared with traditional driving
mechanism, there are no transmission parts and friction. Therefore, ceramic actuator has
the characteristics of no rebound, no maintenance, and no wear, etc.
Flexible hinge structure:
P73 Piezo Objective Scanner adopts flexible hinge mechanism has advantages of no
friction, high positioning accuracy. Flexible hinge is an element not affected by static and
dynamic friction, based on the elastic deformation of metal material (e.g., steel) , there
is no rolling and sliding parts. Flexible unit has very high load capacity and stiffness.
Hinge guide needs no maintenance and no wear and tear. Suitable for a wide range of
temperatures, no lubricating oil is required.
Strain sensor
Strain sensor detects the position information by its own expansion. They are fixed in the
proper position of the transmission part and measure the displacement of the moving
part. This type of position measurement is made by contact and indirect measurement. So
the displacement of the moving platform is measured by measuring lever, guide hinge, or
piezoelectric ceramic stack.
P73 Piezo Objective Scanner is a large-loading scanner with Z travel range up to 1000μm.
It adopts flexible hinge design with no friction, no yaw and high closed-loop control
positioning accuracy.Separate thread adapter design, can be adapted to a variety of types of