Instruction Manual

X axis | 21067

Piezo Linear Actuator

• Coarse adjustment 9.53mm

• Fine adjustment 16μm

• Combination of manual and piezo adjustment

Harbin Core Tomorrow Science & Technology Co., Ltd.

Tel: +86-451-86268790 Email: info@coremorrow.com Headquarters: Building I2, No.191 Xuefu Road, Nangang District, Harbin

Fax: +86-451-86267847 Web: www.coremorrow.com Shanghai Office: Building 2, No.608 Shengxia Road, Pudong District, Shanghai

Make Your Motion and Control More Accurate!

The 21067 piezoelectric linear actuator combines

manual coarse adjustment and piezo fine adjustment.

The manual adjustment stroke can reach 9.53mm and

the fine adjustment stroke is 16μm.

Introduction

Applications

Characteristics

• Mirror adjustment frame

• Motion platform driver

• Profilometry • Scientific research, etc.

• Nano lithography • Surface measurement technique

• Nanotechnology and metrology • Motion in strong magnetic fields o r v a c c u m

PAGE 1
Make Your Motion and Control More Accurate! X axis | 21067 Piezo Linear Actuator Introduction The 21067 piezoelectric linear actuator combines manual coarse adjustment and piezo fine adjustment. The manual adjustment stroke can reach 9.53mm and the fine adjustment stroke is 16μm. Characteristics • Coarse adjustment 9.53mm • Fine adjustment 16μm • Combination of manual and piezo adjustment Applications • Mirror adjustment frame • Motion platform driver • Profilometry • Scientific research, etc.
PAGE 2
Make Your Motion and Control More Accurate! Technical Data Type Manual motion range Piezo motion range (0~150V) Piezo drive voltage El.capacitance Operating temperature[1] Material 21067 Units 9.53 mm 16 μm±20% 0~150 V 0.8 μF±20% -25~85 ℃ Steel Cable length[2] - Voltage connector[2] - Recommended controller m±10mm E53.A、E53.C、E63.C Remarks： [1] Custom is available. [2] Custom cable length and connector ara available. Drawing Recommended Controllers E53.