User guide

NT® INTEGRATED FLOW CONTROLLER WITH DEVICENET™ COMMUNICATION USER GUIDE
4 Customer Service Tel. [phone] Customer Service Fax [phone] ENTEGRIS, INC.
General
Considerations
NOTE: The flow controller has been
factory sealed. Do not attempt to
remove the cover of the unit. Any
attempt at removal of the unit cover
will void the warranty.
Line Pressure
The system line pressure (measured
at the inlet of the unit) must be
between 10 and 60 PSIG (69 to 414
kPa). The minimum operating pres-
sure is 10 PSIG (69 kPa).
Pressure Drop
The minimum pressure drop (differ-
ential pressure) required for the
unit is 10 PSID (69 kPa).
For example, if the flow controller
is operating at an inlet pressure of
15 PSIG (103 kPa) and outputs the
flow to a pressurized canister, which
is pressurized to 10 PSID (69 kPa),
the pressure available to the unit
will be 5 PSID (15 PSIG [103 kPa]
inlet pressure minus 10 PSIG
[69 kPa] canister pressure). This
scenario does not meet the pres-
sure drop requirement of 10 PSID
(69 kPa) and the unit may not
perform within specification. For
this example, either increase the
inlet pressure or decrease the can-
ister pressure to obtain a 10 PSID
(69 kPa) pressure drop.
Ambient Temperature Range
The flow controller is designed to
operate in room temperature clean-
room environments: 50° to 86°F (10°
to 30°C). The unit must be re-zeroed
at operating temperature conditions
for the accuracy specifications to
apply.
Process Temperature Range
The range of acceptable process
temperatures is 50° to 149°F (10°
to 65°C). The flow controller must
be re-zeroed at operating tempera-
ture conditions for the accuracy
specification to apply. PFA isolators
are recommended for process tem-
peratures higher than 122°F (50°C).
Applications involving hydrofluoric
acid (HF) with temperatures above
86°F (30°C) must contact the
factory for recommended materials
of construction. Positive pressure
must be maintained at all times.
Storage Temperature Range
The flow controller will withstand
storage temperatures between -40°
and +122°F (-40° and 50°C) for at
least a 24-hour period with no per-
manent effect on device performance.
Power Supply Requirements
The power supply range for the
standard NT
®
Integrated Flow
Controller is 24 VDC ±10%.
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