User guide

ENTEGRIS, INC. Customer Service Tel. [phone] Customer Service Fax [phone]
NT® INTEGRATED FLOW CONTROLLER WITH DEVICENET™ COMMUNICATION USER GUIDE
Introduction .................................. 2
Identifying Nonstandard
Product Configurations .......... 2
Principle of Operation ............... 2
System Block Diagram .............. 2
Factory Configured .................... 3
Control Mode Functions ............ 3
Autozero Function ..................... 3
Calibration Reference
Conditions ................................ 3
General Considerations .............. 4
Line Pressure .............................. 4
Pressure Drop ............................. 4
Ambient Temperature Range .... 4
Process Temperature Range ..... 4
Storage Temperature Range ..... 4
Power Supply Requirements ..... 4
DeviceNet
TM
Cable ..................... 5
DeviceNet
TM
Communication ... 5
Dimensions ................................. 8
Installation .................................... 9
Provided Equipment .................. 9
Mounting Requirements .......... 10
Mechanical Installation .......... 11
Electrical Connections ............ 12
Unit Operation............................. 14
Operating Environment .......... 14
Performance ............................. 14
Reliability Information............. 16
Diagnostic Guide ........................ 17
Maintenance ............................... 19
Normal Operation .................... 19
Re-zero Function ...................... 19
Reference .................................... 20
Physical Specifications ............ 20
Power Cable Specifications .... 20
DeviceNet
TM
Cable
Specifications ........................ 20
Performance Specifications .... 20
Ordering Information ................ 21
Certifications .............................. 22
CE Compliance ......................... 22
ODVA Conformance .................. 22
DeviceNet
TM
Communication
Integrated Flow Controller ...... 23
Object Model ............................ 23
How Objects Affect Behavior .. 25
Defining Object Interfaces ...... 25
Vendor Specific Section .......... 26
Repair and Warranty Service .... 50
Table of Contents
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