User guide

NT® INTEGRATED FLOW CONTROLLER WITH DEVICENET™ COMMUNICATION USER GUIDE
24 Customer Service Tel. [phone] Customer Service Fax [phone] ENTEGRIS, INC.
Hierarchy of Semiconductor
Equipment Device Objects
Connection Class
I/O
Explicit
Message
Message
Router
Assembly
S-Device
Supervisor
DeviceNet™
Identity
Pressure Flow
S-Analog Sensor Class
S-Analog
Actuator
S-Single Stage
Controller
S-Sensor
Calibration
DeviceNet™
DeviceNet™ Communication
Figure 3. Object model for the FFC device
S-ANALOG SENSOR NAME DESCRIPTION
Instance 1 Flow Virtual sensor that calculates the fluid flow
rate based on various sensed parameters,
for example, differential pressure
Instance 2 Pressure The measured fluid pressure
ENT48906 10/15/04 8:12 AM Page 24