User guide

ENTEGRIS, INC. Customer Service Tel. [phone] Customer Service Fax [phone]
NT® INTEGRATED FLOW CONTROLLER WITH DEVICENET™ COMMUNICATION USER GUIDE
Installation
Provided Equipment
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Remove Unit from the Bag
NOTE: This unit has been assembled
and double-bagged under cleanroom
conditions. To maintain purity, only
open under cleanroom conditions.
CAUTION!
Do not tighten the nuts that
protect the flared tube con-
nections during shipment. (See
Prepare Fluid Lines on page 11).
Tightening these nuts without
the proper tubing installed may
damage the unit’s flared tube
connections.
ENT48906 10/15/04 8:12 AM Page 9