Operating instructions

Jobs

3.2 Clean Up (optional)

If there is a substrate in any module, it is required to perform a cleanup.

If the system contains modules that cannot detect wafers (e.g. plasma

chamber), the software will assume that there is a substrate in the

module. This will set the Equipment Processing State to Aborted.

A cleanup is required to set the state to Idle. The cleanup can be

initiated by going to Jobs and clicking the following button:

As soon as the state is Idle, the initializing process is finished and the

software can be used to operate the system:

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