Operating instructions

Preventive Maintenance Manual
140 Copyright © 2012 EVG
8.4 No High Voltage
Attention High Voltage: Take care when you measure on the high voltage
connectors. Measure only with specified tools and take care about the safety
requirements.
Measure if the
cable has a
connection with
the electrode
No High Voltage
Check Ext. Bond Monitor if Voltage is
displayed
OK NOK
Call EV Service
Measure High Voltage on
the connector plate of the
bondoven (disconnect the
cable to the cover)
OK NOK
Repair or
exchange the
cable
Check if the electrode
spring and the
graphite electrode are
inserted
OK NOK Insert both
Check your
wafers
OK NOK
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