Operating instructions

Troubleshooting
Copyright © 2012 EVG 139
8
8
8.3 Endvacuum not reached
Turbo Pump
on full speed?
Endvacuum
not reached
OK NOK
Which error
is displayed
Check
roughing
pump
OK NOK
Cover
properly
sealed
A
ll fittings
tight?
OK NOK
Call EV
Service
Refer to Turbo
pump manual
Run up time
expired
OK NOK
Others
Tighten and grease them
with high vacuum grease
Grease the
sealrings with high
vacuum grease
Make helium
leak test
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