Operating instructions

Annual Inspection

7.3 Cleaning Procedure

Clean all chambers with IP alcohol. After you have cleaned the whole

chamber (including the heating chuck) wipe all surfaces of the bonder

with IP alcohol. After you have cleaned everything, heat the chamber up

to 300°C and evacuate it overnight.

7.4 Vacuum Pump

Exchange the tip seal of the vacuum pump annually.

7.5 Vacuum Gauges

Remove the vacuum gauges and ship them to the manufacturer for

cleaning and recalibration.

7.6 Heater Cooling

Check the flow rate for the top and bottom side heater. Compare the

rates with the recommended ones.

7.7 Waterlines

Clean all waterlines chemically and mechanically. If there are visible

deposits in the lines check your water quality and the water filter!

7.8 Turbo pump

It is strongly recommended to exchange the oil lubricant reservoir in the

pump annually.

Further instructions how to precede please find in the Pfeiffer Operation

Manual in the Technical Section of this manual.

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