Operating instructions

Quarterly Maintenance

6.2.3.2 Thermo Chuck

The thermo chuck maintenance has to be done weekly.

Figure 131 - Thermo Chuck

6.3 Adjust heater offset

6.3.1 Short Description

6.3.1.1 Temperature offset:

The thermocouple sensors used on EVG bonding systems are very

accurate, but still have a small measurement tolerance. That is why the

same temperature reading on different EVG bonding machines may

lead to a small temperature difference from bonder to bonder.

In order to compensate this difference and to run one production

bonding recipe on different machine with the same result, a temperature

offset setting is possible which can be adjusted individually from

bondchamber to bondchamber.

This setting adds an individually adjustable offset in the range of +5 to -

5°C to the set point in the recipe. The status window on the screen

shows the temperature including the offset.

e.g.: If a 380°C heating set point is adjusted in the recipe and the offset

is defined with +3°C, the heaters reach a temperature of 383°C

according to the thermocouple in the bonder and will show 383°C in the

status window and in the recorder file.

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