Operating instructions

Quarterly Maintenance
Copyright © 2012 EVG 127
6
6
Figure 127 - EVG Polish Procedure
4) After 20 circles clean up chuck insert and stone again with IPA.
Repeat the steps above 10 times.
6.2.2 Thermo Chuck
Use EVG tool (Arkansas) to polish:
Figure 128 - EVG Polish Tool
1) Clean the surface of the thermo chuck with IPA.
2) Clean the polishing tool with IPA.
3) Polish the surface with the tool by sliding the stone in a circular
movement (see below).
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